ELECTRODE ASSEMBLY AND PLASMA PROCESSING APPARATUS HAVING THE SAME

摘要

An electrode assembly and a plasma processing device including the same are provided to maintain flatness of a rear side of a substrate by forming a shadow ring in a boundary surface between divided bottom electrodes. An electrode assembly comprises a plurality of electrode parts(410, 420) and a shadow member(430). A plurality of electrode parts is separated each other. The shadow member is positioned in a boundary between a plurality of electrode parts. The electrode part includes a bottom electrode and a supporting pole. The supporting pole surrounds a side and a bottom of the bottom electrode. The shadow member is positioned in a top of the supporting pole. A top of the shadow member is lower than a top of the bottom electrode.