| 摘要 |
A conditioning disk for a polishing pad is provided to minimize corrosion of a cutting protrusion and to decrease manufacturing cost drastically by using the cutting protrusion made of a corrosion resistant metal material. A conditioning disk for a polishing pad includes a disk body(10) and a plurality cutting protrusions(12) protruded to a wire shape on a surface of the disk body. A corrosion resistant metal material comprises a single layer formed with the same length and the same length and a double layer formed with different length and different height.
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