发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device according to an aspect of the present invention comprises a semiconductor substrate, a ferroelectric capacitor, a protective film and an auxiliary capacitor. The ferroelectric capacitor is provided above the semiconductor substrate and comprises an upper electrode, a lower electrode and a ferroelectric film interposed between the upper and lower electrodes. The protective film is formed, covering the ferroelectric capacitor. The auxiliary capacitor is provided in a circuit section peripheral to the ferroelectric capacitor and uses the protective film as capacitor insulating film.
申请公布号 US7501675(B2) 申请公布日期 2009.03.10
申请号 US20050107890 申请日期 2005.04.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NATORI KATSUAKI;YAMAZAKI SOICHI;YAMAKAWA KOJI;KANAYA HIROYUKI
分类号 H01L27/105;H01L27/108;H01L21/02;H01L21/8246;H01L23/522;H01L27/115;H01L31/113 主分类号 H01L27/105
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