| 摘要 |
A high fill factor spatial light modulator. The spatial light modulator includes a device layer coupled to a support base. The device layer includes a mirror plate and a coplanar flexible member. The spatial light modulator also includes a patterned spacer layer coupled to the mirror plate. In some embodiments, the spacer layer is fabricated from an aluminum layer. The method further includes a reflective layer coupled to the spacer layer.
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