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发明名称
SUBSTRATE PROCESSING APPARATUS, GAS SUPPLY UNIT, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM
摘要
申请公布号
KR100887447(B1)
申请公布日期
2009.03.10
申请号
KR20070082204
申请日期
2007.08.16
申请人
发明人
分类号
H01L21/02;H01L21/00;H01L21/027;H01L21/20
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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