发明名称 |
Apparatuses and methods for suppressing thermally-induced motion of a workpiece |
摘要 |
Apparatuses and methods for suppressing thermally induced motion of a workpiece. An apparatus includes a workpiece heating system configured to thermally induce motion of a workpiece, and further includes a damping member spaced apart from the workpiece and configured to apply a damping force to dampen the motion of the workpiece. The damping member may be spaced apart from a rest position of the workpiece by a distance sufficiently small that gas pressure between the damping member and the workpiece opposes the motion of the workpiece. The distance is preferably adjustable.
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申请公布号 |
US7501607(B2) |
申请公布日期 |
2009.03.10 |
申请号 |
US20040018388 |
申请日期 |
2004.12.20 |
申请人 |
MATTSON TECHNOLOGY CANADA, INC. |
发明人 |
CAMM DAVID MALCOLM;BUMBULOVIC MLADEN;CIBERE JOSEPH;ELLIOTT J. KIEFER;MCCOY STEVE;STUART GREG |
分类号 |
H05B6/80;B25B11/00;H01L21/00;H01L21/68 |
主分类号 |
H05B6/80 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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