发明名称 |
Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities |
摘要 |
The present invention provides a method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities. The method includes accessing measurement information provided by a first measurement device and modifying a sensitivity of a second measurement device based on the measurement information provided by the first measurement device.
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申请公布号 |
US7502702(B1) |
申请公布日期 |
2009.03.10 |
申请号 |
US20050221078 |
申请日期 |
2005.09.07 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
MARKLE RICHARD J.;BODE CHRISTOPHER A.;LENSING KEVIN R. |
分类号 |
G01D18/00 |
主分类号 |
G01D18/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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