发明名称 |
Multi-layer spatial light modulator for amplitude and phase control |
摘要 |
One embodiment relates to a method of independently controlling amplitude and phase modulation by a spatial light modulator. Light is illuminated onto upper layer deflectable planar areas and lower layer deflectable planar areas over a substrate of the spatial light modulator. First active circuitry on the substrate is used to provide amplitude modulation by controlling a relative displacement between upper layer deflectable planar areas and adjacent lower layer deflectable planar areas. Second active circuitry on the substrate is used to provide phase modulation by controlling a displacement between the (upper and lower layer) deflectable planar areas and the substrate. Other embodiments and features are also disclosed.
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申请公布号 |
US7502157(B1) |
申请公布日期 |
2009.03.10 |
申请号 |
US20060391932 |
申请日期 |
2006.03.28 |
申请人 |
SILICON LIGHT MACHINES CORPORATION |
发明人 |
DUEWEKE MICHAEL J. |
分类号 |
G02F1/01 |
主分类号 |
G02F1/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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