发明名称 Antireflective coating for semiconductor devices and method for the same
摘要 According to one embodiment of the present invention, a semiconductor device includes a first layer of dielectric material disposed upon an upper surface of a substrate of a semiconductor device and a first non-conductive layer of metal disposed upon an upper surface of the dielectric material. The first layer of dielectric material and the first non-conductive layer of metal act as an optical trap for electromagnetic radiation received by the first non-conductive layer of metal. In particular embodiments, the semiconductor device may further comprise a second layer of dielectric material disposed upon an upper surface of the first non-conductive layer of metal and a second non-conductive layer of metal disposed upon an upper surface of the second layer of dielectric material.
申请公布号 US7502155(B2) 申请公布日期 2009.03.10
申请号 US20050080727 申请日期 2005.03.15
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 SUDAK PAUL G.;ADAMS ROBERT L.;NEIDRICH JASON M.;JACOBS SIMON JOSHUA;WESNESKI LISA ANN;WILLS LINDA M.;CARTER WILLIAM D.;FREDERIC JUDITH C.
分类号 G02F1/03;G02B26/00;G02B26/08;G02F1/07;G02F1/29 主分类号 G02F1/03
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