发明名称 Shapes-based migration of aluminum designs to copper damascene
摘要 An interconnect structure, method of fabricating the interconnect structure and method of designing the interconnect structure for use in semiconductor devices. The interconnect structure includes a damascene metal wire having a pattern of dielectric filled holes.
申请公布号 US7498250(B2) 申请公布日期 2009.03.03
申请号 US20070837768 申请日期 2007.08.13
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分类号 H01L21/44 主分类号 H01L21/44
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