| 摘要 |
An end effector of a robot tool that includes accelerometers and methods to sense end effector motion. A semiconductor substrate or similar object may be supported by the end effector. Motion of the end effector and associated substrate movement may be transduced and sampled according to specified conditions. The sampled data may be processed, stored and analyzed for subsequent use, and/or may be used in near real time to control end effector movement. Sampled data representative of mechanical events associated with end effector movement may be communicated to a remotely operated processor system.
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