发明名称 Method for manufacturing a non-volatile memory device
摘要 An increase of charge storing capacity, prevention of an over-erase, and a reduction of DeltaVth may be achieved when a 2-bit/cell non-volatile memory device includes a gate of a predetermined width above a semiconductor substrate, an insulating layer between the gate and the semiconductor substrate and at lateral sides of the gate, having a greater width than the gate, a pair of storage layers at the lateral sides of the gate, a pair of blocking layers at the lateral sides of the gate and covering the pair of storage layers, a source and a drain formed in the semiconductor substrate at first opposed locations external to the gate, and a trap impurity implanted into the insulating layer at second locations external to the gate.
申请公布号 US7498227(B2) 申请公布日期 2009.03.03
申请号 US20050205542 申请日期 2005.08.16
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM JEA-HEE
分类号 H01L21/336 主分类号 H01L21/336
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