发明名称 Non-uniformly doped high voltage drain-extended transistor and method of manufacture thereof
摘要 The present invention provides, in one embodiment, a transistor (100). The transistor (100) comprises a doped semiconductor substrate (105) and a gate structure (110) over the semiconductor substrate (105), the gate structure (110) having a gate corner (125). The transistor (100) also includes a drain-extended well (115) surrounded by the doped semiconductor substrate (105). The drain-extended well (115) has an opposite dopant type as the doped semiconductor substrate (105). The drain-extended well (115) also has a low-doped region (145) between high-doped regions (150), wherein an edge of the low-doped region (155) is substantially coincident with a perimeter (140) defined by the gate corner (125). Other embodiments of the present invention include a method of manufacturing a transistor (200) and an integrated circuit (300).
申请公布号 US7498652(B2) 申请公布日期 2009.03.03
申请号 US20040832009 申请日期 2004.04.26
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 PAN SHANJEN;PENDHARKAR SAMEER;TODD JAMES R.
分类号 H01L21/8234;H01L29/93;H01L21/266;H01L21/336;H01L27/06;H01L27/088;H01L29/06;H01L29/08;H01L29/36;H01L29/423;H01L29/76;H01L29/78 主分类号 H01L21/8234
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