发明名称 |
Scanning probe microscope |
摘要 |
A scanning probe microscope for measuring a surface profile of a sample by bringing a probe into close proximity to or contact with the surface of the sample and scanning the sample surface includes: a sample stage movable in at least one axis direction; the probe which is brought into close proximity to or contact with the surface of the sample mounted on the sample stage and scans the sample surface; a probe-driving unit for moving the probe three-dimensionally; a probe deflection detector for detecting a deflection of the probe; and an observation optical system which has an objective lens and observes the probe disposed on substantially the optical axis of the objective lens, and the sample. The probe-driving unit is disposed with three sets of paired drive sources arranged essentially with symmetry with respect to the optical axis of the objective lens.
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申请公布号 |
US7498589(B2) |
申请公布日期 |
2009.03.03 |
申请号 |
US20050251795 |
申请日期 |
2005.10.18 |
申请人 |
HITACHI KENKI FINE TECH CO., LTD. |
发明人 |
MARUYAMA SHIGENOBU;NOMOTO MINEO;KURENUMA TORU;KUNITOMO YUICHI;KEMBO YUKIO |
分类号 |
G21K7/00;G01B21/30;G01Q10/04;G01Q30/02 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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