发明名称 Method for obtaining and processing surface analysis data
摘要 A method of managing data obtained by measurements. The method permits EDS (energy dispersive spectroscopy) spectra to be collected in one operation. Energies detected by an EDS detector are converted by a pulse height analyzer into pulses of heights corresponding to the energies. The heights of the pulses in a distribution are assigned to multiple channels. The number of pulses in each channel is counted. A data processing circuit sends data blocks to a CPU. In each data block, a tag indicative of being X-ray energy data and the value of energy are combined. The CPU sequentially stores incoming data blocks into a hard disk.
申请公布号 US7498573(B2) 申请公布日期 2009.03.03
申请号 US20070656888 申请日期 2007.01.23
申请人 JEOL LTD. 发明人 KANEYAMA MIYUKI;KATAGAMI MASUMI
分类号 G01N23/223 主分类号 G01N23/223
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