HE GAS INJECTOR AND LOW TEMPERATURE SEMICONDUCTOR DEVICE MEASUREMENT PROBE THEREOF

摘要

A vacuum gas helium injector and low temperature semiconductor device measurement probe using the same are provided to accurately control the amount of the gas helium and to prevent the existence of the foreign material except the gas helium in the probe. The gaseous helium is supplied in the helium offer member(110). The piston member(120) controls the amount of the helium which is connected to the helium implantation part. The helium injection member(130) injects helium to the probe to insert the piston member. The first connector(121) is combined with the helium supplying member. The helium movable part(122) is combined with the first connector. The first one-way valve(123) is connected to the helium movable part. The gas is passed through the side.