发明名称 Method and apparatus for simultaneous detection and measurement of charged particles at one or more levels of particle flux for analysis of same
摘要 A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and/or gain in a fully addressable readout manner.
申请公布号 US7498585(B2) 申请公布日期 2009.03.03
申请号 US20060399966 申请日期 2006.04.06
申请人 发明人
分类号 H01J37/244 主分类号 H01J37/244
代理机构 代理人
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