| 发明名称 |
Embrittled substrate and method for making same |
| 摘要 |
This invention relates to a substrate (1) weakened by the presence of a micro-cavities zone, the micro-cavities zone (4') delimiting a thin layer (5) with one face (2) of the substrate (1), some or all of the gaseous species having been eliminated from the micro-cavities (4'). The invention also relates to a process for the production of such a substrate.
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| 申请公布号 |
US7498245(B2) |
申请公布日期 |
2009.03.03 |
| 申请号 |
US20020276306 |
申请日期 |
2002.11.22 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
ASPAR BERNARD;LAGAHE CHRYSTELLE;RAYSSAC OLIVIER;GHYSELEN BRUNO |
| 分类号 |
H01L21/00;H01L21/265;H01L21/02;H01L21/301;H01L21/762;H01L27/12 |
主分类号 |
H01L21/00 |
| 代理机构 |
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