发明名称 Methods and apparatus for test gas leak detection
摘要 A leak detector includes a leak detector inlet to receive a test gas, a vacuum pump coupled to the leak detector inlet, a test gas sensing unit connected through a passage to the leak detector inlet, to sense the test gas, a membrane that is permeable to the test gas, the membrane disposed in the passage between the leak detector inlet and the test gas sensing unit, and a control mechanism to substantially terminate transmission of the test gas through the membrane in a time of 500 milliseconds or less. In other embodiments, the control mechanism substantially terminates transmission of the test gas through the membrane in a time of 100 milliseconds or less.
申请公布号 US7497110(B2) 申请公布日期 2009.03.03
申请号 US20070712135 申请日期 2007.02.28
申请人 VARIAN, INC. 发明人 LIEPERT ANTHONY G.
分类号 G01M3/04 主分类号 G01M3/04
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