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发明名称
基板显影方法及应用其之设备
摘要
一种进行基板显影制程之装置,包括彼此相对之第一洗涤槽及第二洗涤槽。第一洗涤槽及第二洗涤槽系配置于基板支撑部之两侧且用以清洗显影喷嘴。基板支撑部系用以支撑基板。显影喷嘴系沿着水平方向由第一洗涤槽向第二洗涤槽移动并同时供应显影液至基板。第二洗涤槽系于显影喷嘴供应显影液之后接收显影喷嘴,且第二洗涤槽中之洗涤液移除了附着于显影喷嘴之显影液。
申请公布号
TW200910422
申请公布日期
2009.03.01
申请号
TW097132422
申请日期
2008.08.25
申请人
细美事有限公司
发明人
吴斗荣;柳寅 RYU, IN-CHEOL
分类号
H01L21/027(2006.01);H01L21/30(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
祁明辉;林素华
主权项
地址
南韩
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