VAPOR DEPOSITION MASK, VAPOR DEPOSITION MASK DEVICE, METHOD OF PRODUCING VAPOR DEPOSITION MASK, METHOD OF PRODUCING VAPOR DEPOSITION MASK DEVICE AND METHOD OF PRODUCING SHEET SHAPE MEMBER FOR VAPOR DEPOSITION MASK

摘要

A vapor deposition mask, a vapor deposition mask device, a method of producing vapor deposition mask, a method of producing vapor deposition mask device and a method of producing sheet-shaped member for a vapor deposition mask are provided to form deposition mask of high precision by etching lamination structure of a resin sheet and a metal sheet. A lamination structure(30) of a metal sheet(34) and a resin sheet(32) is supplied. The lamination structure is etched and a plurality of holes are formed on the metal sheet. The resin sheet is eliminated from the lamination structure after an etching process. As to the process of etching the lamination structure, a plurality of holes(25) side by side arranged according to specific direction is formed. A plurality of holes are extended according to the other direction meeting the specific direction at right angle. The metal sheet and the resin sheet are separated according to the other direction.