| 摘要 |
PROBLEM TO BE SOLVED: To provide a test device of a static memory element whose productivity is improved. SOLUTION: The test device includes a first test active region 210, a second test active region that is separated from the first test active region in the other direction and is extended in one direction, a plurality of test gate lines 230, a plurality of test contacts 240 that are adjacent to the test gate lines and are formed in the first and the second test active regions, a plurality of connection active regions 212 that electrically connect test contacts formed in the first test active region to test contacts formed in the second test active region in pairs, and a plurality of metal wires 270 that electrically connect two contacts adjacently formed in the first test active region or the second test active region, respectively, thereby forming an open contact chain that electrically connect the plurality of test contacts. COPYRIGHT: (C)2009,JPO&INPIT |
