| 摘要 |
PROBLEM TO BE SOLVED: To provide a polymer which has an excellent heat stability, generates a reduced amount of gas when heated, and has a high rate of dissolution in organic solvents and alkalis and a superior alkali developability. SOLUTION: The novel polymer is obtained by copolymerizing an N-substituted maleimide and/or a compound having a specific structure which is an ether dimer of 2-(hydroxyalkyl) acrylate, vinyl toluene, and a monomer having an acid group as essential components. COPYRIGHT: (C)2009,JPO&INPIT
|
