发明名称 SECURING TOOL AND WORK TREATMENT METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a securing tool that can secure a work reliably and tightly even if performing processing which applies a force to the work, and easily detaches the work after processing, and to provide a processing method of the work using the securing tool. <P>SOLUTION: A suction hole 8 not communicating with a partitioning space 6 and opened to the outer surface on the side of an adhesion layer 3 is formed in a tool body 2. A through hole 9 communicating with the suction hole 8 is formed in the adhesion layer 3 and a suction force is made to act on the work W by evacuation through the suction hole 8. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009043996(A) 申请公布日期 2009.02.26
申请号 JP20070208264 申请日期 2007.08.09
申请人 LINTEC CORP;SHIN ETSU POLYMER CO LTD 发明人 SEGAWA TAKESHI;TANAKA KIYOBUMI
分类号 H01L21/683 主分类号 H01L21/683
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