PIEZOELECTRIC PUMP

摘要

A piezoelectric pump having a pump chamber and an atmospheric chamber on the front and rear of a piezoelectric vibrator with its periphery kept liquid-tight to obtain a pumping function by vibrating the piezoelectric vibrator. The piezoelectric pump wherein it is hard to cause cracks on a piezoelectric layer of the vibrator is obtained. The piezoelectric pump is equipped with the piezoelectric vibrator having an alternately stacked structure comprising at least one shim made of a thin conductive metal plate and at least one piezoelectric layer so that the shim is located the closest to the atmospheric chamber.