OPTISCHER SCHALTER

摘要

A piezoelectric/electrostrictive actuator comprising a plurality of piezoelectric/electrostrictive elements arranged in alignment like teeth of a comb on a base plate and being driven by means of dislocation of piezoelectric/electrostrictive elements. The cell driving type actuator is characterized in that each of cells is formed independently from its adjacent cells by closing respective planes facing the base plate and being positioned between two adjacent piezoelectric/electrostrictive elements with respective cover plates. Thus, there is provided a piezoelectric/electrostrictive actuator; wherein a heating process at a high temperature can be applied, mass production at low cost is possible; the actuator includes cells with slit portions having a width of 60 mu m or less and a high aspect ratio, the cells can be activated with high electric field strength, and great displacement can be obtained with small electric field strength.