| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus capable of detecting a hand position even when an accidental power trouble such as power failure etc. occurs. SOLUTION: This substrate transfer apparatus equipped with a multi-joint arm which will be extended or contracted by belt driving includes detection means (hand position detection device) 120 for detecting the position of a hand 62. The detection means has a rod member 121 relatively movable with respect to a base mount 63, a conversion mechanism 122 for converting the movement of the belt member into the movement of the rod member in the axial direction thereof, a magnetic block 123 mounted on the rod member, and a detection unit 124 for detecting the position of the magnetic block. According to this invention, the position of the hand can be detected by detecting the position of the magnetic block using the detection unit. Further, the returning work of the hand to its home position is made easy, and the reduction of the apparatus uptime can be suppressed. COPYRIGHT: (C)2009,JPO&INPIT
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