发明名称 INERT GAS ETCHING
摘要 A method of patterning a nanostructure film using a plasma is described. The nanostructure film may substantially comprise carbon and/or carbon nanotubes. The plasma may comprise an inert gas. The plasma may be applied to the nanostructure film at close to atmospheric pressure and room temperature.
申请公布号 US2009050601(A1) 申请公布日期 2009.02.26
申请号 US20080197457 申请日期 2008.08.25
申请人 UNIDYM, INC. 发明人 PARK YOUNGBAE;HU LIANGBING
分类号 H01B13/00 主分类号 H01B13/00
代理机构 代理人
主权项
地址