| 摘要 |
A method of testing a test object, comprising the steps of arranging the test object at a deformable contact element of a holding device, wherein the contact element is at least partially deformed so that at least a partial area of the test object is in gap-free contact with at least a partial area of the contact element, and wherein for at least two contact points of the contact element, which are in contact with the partial area of the test object, upon through-radiation by means of electromagnetic radiation that is parallel to a predefined through-radiation direction, an optical path length of the electromagnetic radiation through the holding device and the test object is substantially identical; having the electromagnetic radiation radiate through the holding device and the test object in parallel to the predefined through-radiation direction detecting the electromagnetic radiation after through-radiation; and evaluating the detected electromagnetic radiation.
|
