| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample image rotating method capable of correcting visual field deviation based on accurate visual field deviation detection; and a charged particle beam device. SOLUTION: In the charged particle beam device provided with a means for rotating an image of a sample mounted on a sample base as one embodiment for solving the above problem, the sample image rotating method selects part of an image before rotating the sample image as a template, searches the inside of the image after rotating the sample by using the selected template, and corrects visual field deviation based on the distance between a part from which the template has been selected and a part which the image after rotating the sample has matched. The charged particle beam device is also provided. COPYRIGHT: (C)2009,JPO&INPIT
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