| 摘要 |
PROBLEM TO BE SOLVED: To provide an atomic force microscope that reduces the effect of the relative positional fluctuations of a cantilever with an article to be inspected and enables high-accuracy measurements. SOLUTION: The measurement standard for the displacement of the cantilever 12 is set as the article 1 to be inspected, and one of two types of polarized light separated by a lotion prism 28 is irradiated on the article 1 to be inspected to be set as a reference light; while the other polarized light is irradiated on the cantilever 12 to be set as light to be inspected. The relative displacement of the leading end of the cantilever 12 and the article 1 to be inspected is measured directly by using an interference optical system, and the reference light and the light to be inspected are set to a common light path to remove the ghost factor, and in order to further perform high-accuracy measurements even with respect to various articles to be inspected, the quantity ratio of the reference light and the light to be inspected can be regulated. COPYRIGHT: (C)2009,JPO&INPIT
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