发明名称 METHOD OF POLISHING TAPE-SHAPED SUBSTRATE AND SUBSTRATE FOR OXIDE SUPERCONDUCTOR
摘要 A target surface of a tape-shaped substrate of an oxide superconductor with an intermediate layer formed on this target surface and an oxide superconductor thin film is polished by causing the tape-shaped substrate to continuously run. The polishing step includes an initial polishing process for carrying out random polishing of the target surface and a finishing process that is carried out after the initial polishing process for forming grooves on the target surface along the running direction of the substrate. The intermediate layer has an in-plane directionality of 7° or less. The tape-shaped substrate is fabricated by rolling nickel, a nickel alloys or stainless steel.
申请公布号 US2009054243(A1) 申请公布日期 2009.02.26
申请号 US20080194346 申请日期 2008.08.19
申请人 NIHON MICRO COATING CO., LTD. 发明人 HORIE YUJI;KUMASAKA NORIYUKI;HORIMOTO SANAKI
分类号 B24B1/00;B24B7/13;B24B37/20;H01B12/06;H01L39/02 主分类号 B24B1/00
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