| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve problems in a matrix electron source display using a thin film electron source, wherein an after-image phenomenon occurs when a display luminance is changed greatly and that an element failure is apt to occur when a laminated film is used for a lower electrode. <P>SOLUTION: The Nd concentration in a tunnel insulating film 11 is made smaller than the Nd concentration in the lower electrode 13, thereby the accumulated charge amount in the tunnel insulating film 11 is reduced and the after-image is also reduced. By appropriately establishing the relations between the lamination boundary position of the lower electrode 13 and the thickness of the insulating layer, occurrence of an element failure is prevented. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
