| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater and a coating method which can apply a liquid material onto a substrate with uniform thickness. SOLUTION: A substrate S can be conveyed under a state where vibration of the substrate is suppressed, since the flow rate of air discharged from an air discharge hole and the flow rate of air sucked from an air suction hole are controlled to be equalized substantially by a flowmeter and an adjusting mechanism. The resist can be applied onto the substrate with uniform thickness, since uneven crossing of the liquid material across a resist film can be prevented even when resist is applied to the front surface of the substrate S while conveying the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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