METHOD FOR MANUFACTURING TRANSMISSIVE LIQUID CRYSTAL DISPLAY ELEMENT, TRANSMISSIVE LIQUID CRYSTAL DISPLAY ELEMENT, AND LIQUID CRYSTAL PROJECTOR

摘要

PROBLEM TO BE SOLVED: To obtain a transmissive liquid crystal display element which utilizes a silicon substrate and which provides a bright image. SOLUTION: The method for manufacturing the transmissive liquid crystal display element comprises the steps of: forming circuit elements such as transistors to control respective pixel electrodes of the transmissive liquid crystal display element on a surface of a silicon substrate 1 of an SOI substrate; reducing thickness of a silicon substrate 2 as a supporting substrate; implanting hydrogen ions to the silicon substrate 2 and dividing it; releasing the divided silicon substrates 2; polishing surfaces of the released silicon substrates 2; sticking the polished side of the silicon substrate 2 to a transparent substrate 1; removing the silicon substrate 1 and the silicon substrate 2 corresponding to the pixel electrodes; forming insulating films instead of the removed substrate on the circuit elements; flattening the insulating films; forming a contact hole to make the circuit element and the pixel electrode conductive between each other; and forming the pixel electrodes. COPYRIGHT: (C)2009,JPO&INPIT