| 摘要 |
PROBLEM TO BE SOLVED: To provide a plate type lamination apparatus in which in a plate type vacuum lamination device carrying out only lamination in a vacuum, when a hydraulic cylinder is installed outside a vacuum chamber, its moving rod is inserted through the wall of the vacuum chamber, and a pressurization plate is moved vertically, even if a mechanism for keeping the airtightness between the moving rod and the wall of the chamber is made an easy mechanism, the inside of the chamber is not fouled by a vacuum grease etc., used in the part, and it is free from the defective adhesion caused by contaminants having intruded between a loading film and a substrate. SOLUTION: In the plate type lamination apparatus, a bellows type air spring 8 for moving the pressurization plate 5 or a support plate vertically is installed in the vacuum chamber 1. COPYRIGHT: (C)2009,JPO&INPIT
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