| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method capable of improving the uniformity of a drying rate of a liquid material ejected from a plurality of ejection ports. SOLUTION: The coating apparatus is constituted of a plurality of linear areas 93 each extending in the main scanning direction and disposed on a substrate 9 at an area pitch V in the sub-scanning direction vertically intersecting the main scanning direction, and a coating head 14 equipped with a plurality of ejection ports 171 each adjoining one after another in the sub-scanning direction at a pitch six times as long as the area pitch V, from which an organic EL liquid is ejected onto the linear areas 93 disposed on the substrate 9 while causing the coating head 14 to scan the substrate 9 in the main scanning direction to form a plurality of linear elements 94. Whenever the coating head 14 scans the substrate 9 in the sub-scanning direction, each of the ejection ports 171 is separated immediately after the sub-scanning, by a gap at least 6 times as wide as the area pitch V in the sub-scanning direction from any of the linear areas 93 whereon the organic EL liquid has been applied by the main scanning by the coating head 14 immediately before its carrying out the above sub-scanning. As a result, the uniformity of the drying rate of the organic EL liquid ejected onto the substrate 9 from the plurality of ejection ports 171 can be improved. COPYRIGHT: (C)2009,JPO&INPIT
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