发明名称 Non-volatile memory device including charge trap layer and method of manufacturing the same
摘要 Provided are a non-volatile memory device and a method of manufacturing the non-volatile memory device. The non-volatile memory device includes a charge trap layer having a crystalline material. In the method, a tunneling insulating layer is formed on a substrate, and a crystalline charge trap layer is formed on the tunneling insulating layer.
申请公布号 US2009050954(A1) 申请公布日期 2009.02.26
申请号 US20080071351 申请日期 2008.02.20
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI SANG-MOO;SEOL KWANG-SOO;PARK SANG-JIN;SUNG JUNG-HUN
分类号 H01L29/792;H01L21/28 主分类号 H01L29/792
代理机构 代理人
主权项
地址