| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized acceleration sensor of a simple structure and high sensitivity. SOLUTION: This acceleration sensor 1 is a vibratory body 10 including a base part 20 fixed on a base and a beam-shaped vibration arm 21 extended out of the base part 20 and bending/vibrating in a planar direction at a prescribed resonance frequency. The vibration arm 21 has: vibration arm parts 23 and 24 separated from each other by a through hole 22 bored therethrough at its widthwise middle part, vertically to its vibrating direction, and in its longitudinal direction; an additional mass part 25 together connecting end parts of the arm parts 23 and 24 separated from each other and having mass equal to or larger than that of the base part 20; and excitation electrodes 31 to 34 provided on the arm parts. The vibration arm 21 is supported by a pseudo both-end fixation structure comprising the base part 20 and the mass part 25, and used for detecting a change in the resonance frequency of the vibratory body 10 owing to an inertia effect of the mass part 25 when acceleration is given thereto. COPYRIGHT: (C)2009,JPO&INPIT
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