| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotation fluctuation measuring device and a scale section capable of enhancing measurement precision of fluctuation of a shaft center of a measuring object by suppressing variability of output features to displacement of the measured object. SOLUTION: When a scale section 11 is attached to a shaft F and the shaft F is rotated to an X-axis head section 22, the scale section 11 reflects laser beam L1 irradiated from an irradiating unit 30 of the X-axis head section 22 into an encoder light receiving unit 40 of the X-axis head section 22 continuously during one rotation of the shaft F. As described, since fluctuation of a shaft center T of the shaft F is measured with frequency of variation of intensity of the laser beam L2 due to displacement of the scale section 11, fluctuation of the shaft center T of the shaft F is measured without influence of electrical characteristic variation of the shaft F even for a long time. Thus, measurement precision of fluctuation of the shaft center T is enhanced in a prolonged measuring. COPYRIGHT: (C)2009,JPO&INPIT
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