FINE SHAPE MEASUREMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To simplify an optical system, remove disturbances such as thermal expansion, vibration and fluctuation in the movement of a mechanism, and achieve a reliable and accurate measurement of a fine shape. SOLUTION: A fine shape measurement apparatus is based on a Michelson interferometer comprising: a dividing means 7 for dividing a monochrome light 6 into a measurement light 8 traveling in the direction of a measurement face 13 and a reference light 9 traveling in the direction orthogonal to the measurement light; a reflecting means 17 for reflecting the reference light in the direction parallel to the measurement light; and a combining means 16 for combining the measurement light 15 reflected in the direction opposite to the reference light 9 by the dividing means 7 after it is reflected by the measurement face and the reference light 19 returning in the direction parallel to the measurement light 14 reflected by the measurement face. The measurement face 13 corresponds to a corner point O of a right triangle mirror. Mirrors M1, M2, M3correspond to the right triangle mirror, and are disposed in an optical path of the reference light 18 reflected by the reflecting means 17. COPYRIGHT: (C)2009,JPO&INPIT