发明名称 Test device, SRAM test device, semiconductor integrated circuit device and methods of fabricating the same
摘要 A test device, SRAM test device, semiconductor integrated circuit, and methods of fabricating the same are provided. The test device may include a first test active region extending in one direction on a semiconductor substrate, a second test active, apart from the first test active region, extending in one direction on a semiconductor substrate, a plurality of test gate lines crossing the test active regions, a plurality of test contacts on at least one of the test active regions and test gate lines, a plurality of conducting regions electrically connecting the test contacts, and a plurality of conductive wiring lines interconnecting the plurality of test contacts, wherein an open contact chain, which electrically connects the plurality of test contacts, is formed.
申请公布号 US2009050886(A1) 申请公布日期 2009.02.26
申请号 US20080222476 申请日期 2008.08.11
申请人 LEE SUN-JUNG;SHIN HONG-JAE 发明人 LEE SUN-JUNG;SHIN HONG-JAE
分类号 H01L23/58;G01R31/26 主分类号 H01L23/58
代理机构 代理人
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