| 摘要 |
PROBLEM TO BE SOLVED: To preferably perform inspections on both surfaces of a disk at the same time by suppressing the generation of particles. SOLUTION: A passive spring member urging at least one pawl 18 among a plurality of pawls 16, 17 and 18 to be inserted into a hole 14 formed through a disk 12 toward the outside of the hole 14 is provided, and the disk 12 is held in a vertical position by pressing the peripheries of the pawls 16, 17 and 18 into contact with the peripheral edge of the hole 14 of the disk 12 by the spring member. The outer diameter of a chuck body 20 is smaller than the hole diameter of the disk 12. A sliding section (rotation shaft 36 portion) of a movable mechanism for moving the pawl 18 is set at a position separated from the disk 12 by a distance obtained by subtracting the inner peripheral radius from the outer peripheral radius of the disk 12 or farther. It is preferable to use polybenzimidazole as a pawl material. COPYRIGHT: (C)2009,JPO&INPIT
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