| 摘要 |
PROBLEM TO BE SOLVED: To provide an electric part high in reliability, and its manufacturing method. SOLUTION: This electric part has a substrate 12 having a function element 11, a cover body 13 having a recessed part 13a larger in size than the function element 11, an adhesive layer 14 on which the recessed part 13a and the function element 11 are opposed to each other, and the cover body 13 is fastened to the substrate 12, and a sealing layer 15 to cover the outside of the adhesive layer 14 and smaller in gas permeability than the adhesive layer 14. The outside of the adhesive layer 14 is covered with the sealing layer 15 after an atmosphere in a cavity surrounded by the substrate 12 and the recessed part 13a is adjusted through the adhesive layer 14. COPYRIGHT: (C)2009,JPO&INPIT
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