| 摘要 |
PROBLEM TO BE SOLVED: To provide a pollution-free spin coater capable of recovering to recycle 100% of a dripping member without forcibly discharging the dripping member in the spin coater for forming a film by dripping the dripping member on a rotating disk-like member. SOLUTION: The spin coater is constituted of a rotary base on which the disk-like member is placed, a dripping nozzle for dripping the desired dripping member on the upper surface of the disk-like member, a nearly doughnut-like coating cup for preventing the scattering of excess dripping member, a drain pipe for recovering the excess dripping member from the nearly doughnut-like coating cup and a recovery tank connected to the drain pipe. The nozzle is arranged above the rotary base to drip the desired dripping member on the disk-like member. The coating cup has a nearly egg-shaped doughnut-like cross-section and is provided with the disk-like member and the rotary base at the center part inside. The drain pipe has a structure that the dripping member flows down from one side of the coating cup and is recovered to the recovery tank without being exposed to the air. COPYRIGHT: (C)2009,JPO&INPIT
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