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发明名称
Method for chemical polishing of copper
摘要
申请公布号
US3008812(A)
申请公布日期
1961.11.14
申请号
US19580749597
申请日期
1958.07.21
申请人
ALBRIGHT AND WILSON (MFG.) LIMITED
发明人
SPAHN HEINZ;WELLS FREDERICK H.
分类号
C23F3/06
主分类号
C23F3/06
代理机构
代理人
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