| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic acceleration sensor suitable for miniaturization, and measuring accelerations in a plurality of axial directions using one element. <P>SOLUTION: The magnetic acceleration sensor includes a first substrate 11 having a main surface; a GMR element 111 formed in the first substrate 11; spindles 122, bonded to the main surface of the first substrate 11 so as to form a cavity 13 between the first substrate 11 and having a hard magnetic layer facing the GMR element 111; and a second substrate 12, having beams 123 for swingably supporting the spindles 122. Two spindles 122 are respectively provided in the first and second axial directions as the axial directions to be measured, and the accelerations are measured by the changes in the magnetic resistance of the GMR element 111, in response to the spindles 122 that swings about the axes formed by the beams 123 by having a force applied thereto. <P>COPYRIGHT: (C)2009,JPO&INPIT |
