| 摘要 |
PROBLEM TO BE SOLVED: To provide a raw material for forming a thin film, and containing a strontium precursor having properties such as evaporation property, thermal stability, etc., which is suitably used especially as a raw material for CVD. SOLUTION: The thin film-forming raw material contains a strontium compound obtained by adding a bidentate compound expressed by general formula (1) (in the formula, R<SP>1</SP>and R<SP>6</SP>are each independently a 1-4C alkyl group; R<SP>3</SP>to R<SP>5</SP>are each independently a hydrogen atom or a 1-4C alkyl group; X and Y are each independently an oxygen atom, -NH- or -NR-; and R is a 1-4C alkyl group) to bis(pentamethylcyclopentadienyl)strontium. COPYRIGHT: (C)2009,JPO&INPIT
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