| 摘要 |
PROBLEM TO BE SOLVED: To provide a master disk cleaning method which can effectively remove both organic dust and inorganic dust and be introduced into a production line (an on-line production line), and also provide a device therefor. SOLUTION: A part of the curvature part (52) of an adhesive member (50) having a shape which curves its adhesive face toward the outside is contacted with master disks (12, 14), and a cleaning head (20) is reciprocally moved in the in-disk surface directions of the master disks (12, 14) under the condition that the part of the curvature part (52) is pressed on the master disks (12, 14). In this case, a≥b is preferable, wherein a represents a width in the ground contact area of the adhesive member (50) in the reciprocating movement direction, and b represents the both amplitudes of the reciprocating movement. COPYRIGHT: (C)2009,JPO&INPIT |
