发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which comprises a high-withstand voltage circuit having lead breakdown voltage more than 10 V. SOLUTION: An n-type second well 8 is formed on a p-type first well 3 so as to surround an n-type semiconductor region 7 that constitutes a source of high-withstand voltage nMIS4 of a 18 V system high withstand voltage driving circuit 1HV, and an n-type semiconductor region 7 that constitutes a drain. A p-type channel stopper layer 13 is formed between the n-type second well 8 surrounding the n-type semiconductor region 7 that constitutes a drain, and the n-type second well 8 surrounding the n-type semiconductor region 7 that constitutes a source. A p-type buried layer 16 having the higher impurity concentration than that of the p-type first well 3 or the p-type channel stopper layer 13, is formed in the region whose depth is larger than that of the interface of the n-type second well 8 and the p-type first well 3, and is smaller than that of the interface of the p-type first well 3 and the substrate 2. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009044036(A) 申请公布日期 2009.02.26
申请号 JP20070209085 申请日期 2007.08.10
申请人 RENESAS TECHNOLOGY CORP 发明人 YOSHIZUMI KEIICHI;TAKASHINO HIROYUKI;MAEKAWA KEIICHI;YASUOKA HIDEKI
分类号 H01L29/78;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092 主分类号 H01L29/78
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